How Thermal Mass Changes the Behavior of a Mica Heating Plate

https://thin-heater-technology.northvaledigest.com/posts/wafer-heater-selection-guide-for-process-equipment-engineers

In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry